SEMPrep2
High-quality and site-specific
sample preparation for SEM application
- Cross-sectional sample preparation by slope cutting in 90° and 30° angles using dedicated sample holders
- Final polishing and cleaning of traditional SEM and EBSD samples
- Load-lock system for faster, easier, and safer sample exchange
- High-energy ion gun for rapid milling and low-energy ion gun for gentle surface polishing and cleaning
- Optional ultra-high-energy ion gun, recommended for ion milling of extra hard materials and for extreme fast milling
- Low-energy ion gun for gentle surface polishing and cleaning
- Automated parameter settings and operation
- Sample rotation and oscillation
- Real-time monitoring of the milling process by high-resolution CMOS camera and TFT monitor
Description
The SC-2100 model is equipped with both high- and low-energy ion sources. Rapid slope cutting with the high-energy ion gun provides cross-sectional SEM samples for semiconductor industry, material sciences, geology and other scientific and industrial purposes. The system also delivers a solution to improve and clean mechanically polished SEM samples and to prepare damage-free surfaces for EBSD measurements. The new 16 keV ultra-high-energy ion source is more powerful and has a higher sputtering rate than before. For the most gentle surface treatment of the delicate samples, the low-energy ion source is also available.
Specifications
Ion sources
- two ion guns:
- high-energy ion gun operating from up to 10 keV or
optionally ultra high-energy ion gun operating up to 16 keV
- low-energy ion gun in the range of 100 eV to 2 keV
continuously and independently adjustable milling energy
Sample stage
- sample size:
- slope cutting sample holder (available with 30º, 90º tilted platforms)
- for 30º, holder: max. max. 42 mm (l) x 16 mm (w) x 5.5 mm (th)
- for 90º holder: max. 20 mm (l) x 16 mm (w) x 7.0 mm (th)
- sample holder for surface cleaning using 3 different head types:
- flat head type: max. max. Ø33,5 mm x 8 mm
- standard type: max. max. Ø33,5 mm x 9 mm
- hollow type 1: max. max. Ø26 mm x 21 mm
- hollow type 2: max. Ø32 mm x 19,5 mm
- sample tilting: 0º to 30º in 0.1º increments
- sample rotation: in-plane rotation, 360º
- sample oscillation: in-plane oscillation from ±10º to ±120º in 5º steps
Sample cooling
- LN2 cooling to prepare heat-sensitive samples (optional)
- Peltier cooling to protect the samples from thermal overrun (optional)
Vacuum system
- oil-free diaphragm and turbomolecular pumps with combined (Pirani/Penning) vacuum gauge
Gas supply system
- 99.999% purity argon
- high-precision working gas flow control with motorized needle valve
Imaging system
- high-resolution CMOS camera with fix zoom
Computer control
- easy-to-use graphical interface, automated ion source setup, milling parameter setting and operation control