SEMPrep 2

SC-2100 SEMPrep for high-quality site-specific sample preparation for SEM application

SEMPrep 2

SEMPrep2

High-quality and site-specific
sample preparation for SEM application

  • Cross-sectional sample preparation by slope cutting in 90° and 30° angles using dedicated sample holders
  • Final polishing and cleaning of traditional SEM and EBSD samples
  • Load-lock system for faster, easier, and safer sample exchange
  • High-energy ion gun for rapid milling and low-energy ion gun for gentle surface polishing and cleaning
  • Optional ultra-high-energy ion gun, recommended for ion milling of extra hard materials and for extreme fast milling
  • Low-energy ion gun for gentle surface polishing and cleaning
  • Automated parameter settings and operation
  • Sample rotation and oscillation
  • Real-time monitoring of the milling process by high-resolution CMOS camera and TFT monitor

Description

The SC-2100 model is equipped with both high- and low-energy ion sources. Rapid slope cutting with the high-energy ion gun provides cross-sectional SEM samples for semiconductor industry, material sciences, geology and other scientific and industrial purposes. The system also delivers a solution to improve and clean mechanically polished SEM samples and to prepare damage-free surfaces for EBSD measurements. The new 16 keV ultra-high-energy ion source is more powerful and has a higher sputtering rate than before. For the most gentle surface treatment of the delicate samples, the low-energy ion source is also available.

Specifications

Ion sources

  • two ion guns:
    • high-energy ion gun operating from up to 10 keV or
      optionally ultra high-energy ion gun operating up to 16 keV
    • low-energy ion gun in the range of 100 eV to 2 keV
      continuously and independently adjustable milling energy

Sample stage

  • sample size:
    • slope cutting sample holder (available with 30º, 90º  tilted platforms)
      • for 30º, holder: max. max. 42 mm (l) x 16 mm (w) x 5.5 mm (th)
      • for 90º  holder: max. 20 mm (l) x 16 mm (w) x 7.0 mm (th)
    • sample holder for surface cleaning using 3 different head types:
      • flat head type: max. max. Ø33,5 mm x 8 mm
      • standard type: max. max. Ø33,5 mm x 9 mm
      • hollow type 1: max. max. Ø26 mm x 21 mm
      • hollow type 2: max. Ø32 mm x 19,5 mm
  • sample tilting: 0º to 30º in 0.1º increments
  • sample rotation: in-plane rotation, 360º 
  • sample oscillation: in-plane oscillation from ±10º to ±120º in 5º steps

Sample cooling

  • LN2 cooling to prepare heat-sensitive samples (optional)
  • Peltier cooling to protect the samples from thermal overrun (optional)

Vacuum system

  • oil-free diaphragm and turbomolecular pumps with combined (Pirani/Penning) vacuum gauge

Gas supply system

  • 99.999% purity argon
  • high-precision working gas flow control with motorized needle valve

Imaging system

  • high-resolution CMOS camera with fix zoom

Computer control

  • easy-to-use graphical interface, automated ion source setup, milling parameter setting and operation control

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