Cross-sectional sample preparation by slope cutting with high-energy ion gun; precise site-positioning ; Final polishing and cleaning with low-energy ion gun; damage-free surfaces for EBSD study. Applicable for multilayer systems, semiconductors, high Tc superconductors, composite materials, diamond films, glasses, etc.
•Monitoring of liquid- and airborn particles for environment management and filtering of health hazards.
•Monitoring of nano particles in industrial processing.
